Stable amorphous silicon and improved microcrystalline silicon by photon-assisted electron cyclotron resonance chemical vapor deposition

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作者：
Song, Young J. [1 ]
Anderson, Wayne A. [1 ]
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[1] State University of New York at Buffalo, Dept. of Electrical Engineering, Amherst, NY 14260, United States
来源：
Materials Research Society Symposium - Proceedings | 1999年 / 557卷
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页码：49 / 54
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