Stable amorphous silicon and improved microcrystalline silicon by photon-assisted electron cyclotron resonance chemical vapor deposition

被引：0

作者：

Song, Young J. ^{[1
]}

Anderson, Wayne A. ^{[1
]}

机构：

[1] State University of New York at Buffalo, Dept. of Electrical Engineering, Amherst, NY 14260, United States

来源：

Materials Research Society Symposium - Proceedings | 1999年 / 557卷

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摘要：

引用

页码：49 / 54

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