Preparation of titanium dioxide thin films by means of a hot wall technique

被引:1
作者
Nakamura, Takato [1 ]
Asai, Hiroshige [1 ]
Akiyama, Mikiya [1 ]
Azuma, Naoto [1 ]
Takahashi, Naoyuki [1 ]
Ishino, Kenei [1 ]
Fujiyasu, Hiroshi [1 ]
Yoshioka, Masayuki [2 ]
机构
[1] Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan
[2] Shizuoka Indust. Res. Inst. S., 2078 Makigaya, Shizuoka, 421-12, Japan
来源
Applied Surface Science | 1999年 / 142卷 / 01期
关键词
This work was supported by the Research for the Future Programme of The Japan Society for the Promotion of Science under contract No. [!text type='JS']JS[!/text]PS-RFTF96R12501;
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12
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页码:182 / 187
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