MATERIALS AND APPLICATIONS FOR THIN FILMS IN HYBRID MICROELECTRONICS.

被引：0
|
作者：
Zinsmeister, G.
机构：
来源：
Electrocomponent Science and Technology | 1979年 / 6卷 / 3-4期
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中图分类号：
TN7 [基本电子电路];
学科分类号：
080902 ;
摘要：
The use of thick films in microelectronics has increased in an impressive way during the last years. In contrast to this, thin films have shown a less spectacular but nevertheless steady evolution which concerned mainly more efficient deposition methods (planar magnetron) as well as higher quality films and thus better components and circuits. The present paper aims at illustrating this by some selected examples.
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页码：209 / 214
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