ALTERNATIVES TO FURNACE ANNEALING.

被引：0

作者：

Iscoff, Ron ^{[1
]}

机构：

[1] Semiconductor Int, Des Plaines, IL,, USA, Semiconductor Int, Des Plaines, IL, USA

来源：

Semiconductor International | 1985年 / 8卷 / 05期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：78 / 84

共 50 条

[31] FORMATION OF PALLADIUM AND TITANIUM SILICIDES BY RAPID THERMAL ANNEALING. [J].

Levy, D. ;

Ponpon, J.P. ;

Grob, A. ;

Grob, J.J. ;

Siffert, P. .

Physica B: Physics of Condensed Matter & C: Atomic, Molecular and Plasma Physics, Optics, 1984, 129 B-C (1-3) :205-209

[32] The structural changes in copper effected by cold rolling and annealing. [J].

Cook, Maurice ;

Richards, T. Ll. .

JOURNAL OF THE INSTITUTE OF METALS, 1940, 66 :1-15

[33] DIRECT SILICIDATION OF Co ON Si BY RAPID THERMAL ANNEALING. [J].

Tabasky, Marvin ;

Bulat, Emel S. ;

Ditchek, Brian M. ;

Sullivan, Maureen A. ;

Shatas, Steven C. .

IEEE Transactions on Electron Devices, 1987, ED-34 (03) :548-553

[34] ACTIVATION OF POLYSILICON CONNECTIONS BY SELECTIVE CW LASER ANNEALING. [J].

Calder, I.D. ;

Naguib, H.M. .

Electron device letters, 1985, EDL-6 (10) :557-559

[35] SHALLOW JUNCTIONS BY ION IMPLANTATION AND RAPID THERMAL ANNEALING. [J].

Hill, Chris .

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B19-20 :348-358

[36] Transformation of meteoritic diamonds to graphitic onions upon annealing. [J].

Braatz, A ;

Banhart, F ;

Henning, T ;

Ott, U .

METEORITICS & PLANETARY SCIENCE, 1999, 34 :A16-A17

[37] TEMPERATURE BEHAVIOUR OF THE CRYSTALLINE LATTICE OF ORIENTED POLYTETRAFLUOROETHYLENE DURING ANNEALING. [J].

Shirina, N.G. ;

Zubov, Yu.A. ;

Kostromina, S.V. .

Polymer science USSR, 1986, 28 (06) :1454-1460

[38] On the Modification of Structural, Morphological, and Electronic Properties of InP (110) by Annealing. [J].

Dumas, M. ;

Benkacem, M. ;

Palau, J.M. ;

Lassabatere, L. .

Le Vide, les couches minces, 1988, 43 (241) :241-244

[39] TRANSPORT PROPERTIES OF SILICIDES: EFFECTS OF ION-IRRADIATION AND ANNEALING. [J].

Suni, I. ;

Gronberg, L. ;

Saarilahti, J. .

Vide, les Couches Minces, 1987, 42 (236) :233-236

[40] RECOVERY MECHANISM OF IRRADIATED MATERIALS DURING STATE II OF ANNEALING. [J].

Arbuzov, V.L. ;

Klotsman, S.M. ;

Podchinenov, I.Ye. .

1600, (52)

← 1 2 3 4 5 →