Synthesis and characterization of zinc sulfide thin films by pyrolysis and application to thin film electroluminescence

被引:0
作者
Yokoyama, Masao [1 ]
Nanao, Tsutomu [1 ]
Eguchi, Tamiyuki [1 ]
Taniguchi, Masao [1 ]
机构
[1] Kanegafuchi Chemical Industry Co Ltd, Kobe, Japan
来源
Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan | 1992年 / 100卷 / 1157期
关键词
Electroluminescence - Films - Pyrolysis - Glass - Coatings - HYDROGEN SULFIDE - Semiconducting Zinc Compounds - Characterization;
D O I
10.2109/jcersj.100.42
中图分类号
学科分类号
摘要
Thermal decomposition of zinc 2-ethyl-hexanoate solution on glass substrates gave zinc oxide thin films. Zinc sulfide thin films were obtained by sulfidation of the zinc oxide films in a hydrogen sulfide atmosphere. The ZnS films were transparent, had a high degree of crystallinity with [111] preferred orientation, and the breakdown voltage of these films was about 28 Vrms at a film thickness of 430 nm (breakdown field was about 0.65 MV/cm). The microstructure of the cross section of the ZnS thin films formed on a glass substrate was a particle-stacked structure, which is different from the columnar or conical grain structures obtainable by electron beam evaporation or sputtering. MIS (Metal/Insulator/Semiconductor)-type and sandwich (Metal/Insulator/Semiconductor/Insulator)-type thin film EL (electroluminescent) devices fabricated using the ZnS thin films showed EL emission above 100 ft-L at 130 Vrms, 5 kHz sine wave.
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页码:42 / 47
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