Fabrication of Silicon-based GeSi alloy optical waveguides

The new development in silicon optical integration, and the design and processes of fabrication of GeSi/Si single-mode rib waveguide at the wavelength of 1.3 μm were reported. The propagating loss of the waveguide has reached 0.7 dB/cm. The height and width of the waveguide are 4-8 μm and 8-12 μm respectively. The size of them are comparable to those of single -mode fiber cores. Besides, the numerical aperture of the waveguide at the ends are matched to the fiber also. The fabricated waveguide meets all the demands of silicon optical integration. Finally, the single mode outputs from a Y-shaped power divider prepared by the waveguide mentioned above was presented.