Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films

被引：0
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作者：
Ghen, G.L. [1 ]
Li, Y. [2 ]
Lin, J. [1 ]
Huan, C.H.A. [1 ]
Guo, Y.P. [1 ]
机构：
[1] Department of Physics, National University of Singapore, Lower Kent Ridge Road, Singapore 119260, Singapore
[2] Department of Materials Science, National University of Singapore, Lower Kent Ridge Road, Singapore 119260, Singapore
来源：
Journal of Physics D: Applied Physics | / 32卷 / 03期
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页码：195 / 199
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