Gas Detectors Based on Metal Oxide Semiconductors.

被引：0
|
作者：
Huebner, Hans-Peter [1 ]
Obermeier, Ernst [1 ]
机构：
[1] Fraunhofer-Inst fuer, Festkoerpertechnologie, Munich, West, Ger, Fraunhofer-Inst fuer Festkoerpertechnologie, Munich, West Ger
来源：
TM. Technisches Messen | 1985年 / 52卷 / 02期
关键词：
SEMICONDUCTOR MATERIALS - Applications - SENSORS - Design;
D O I：
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中图分类号：
学科分类号：
摘要：
Gas sensors available today are mainly based on metal oxide semiconductors. Tin oxide and sometimes zinc oxide are the basic materials. The paper discusses the principles of these sensors and the effect of catalytic additions as well as other parameters to the sensor properties. The established production technologies such as sintering, thin film and thick film technology, respectively, are described.
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页码：59 / 66
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