NANOSTRUCTURES FOR QUANTUM PHYSICS.

被引：1

|

作者：

Bellessa, J. ^{[1
]}

Carcenac, F. ^{[1
]}

Izrael, A. ^{[1
]}

Launois, H. ^{[1
]}

Mailly, D. ^{[1
]}

机构：

[1] CNET/CNRS, Bagneux, Fr, CNET/CNRS, Bagneux, Fr

来源：

Microelectronic Engineering | 1987年 / 6卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(87)90034-7

中图分类号：

学科分类号：

摘要：

LITHOGRAPHY

引用

收藏

页码：175 / 180

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