Impurity-free vacancy diffusion technique for InGaAsP/InP multiple quantum well laser structure

被引:4
作者
Han, De-Jun [1 ,2 ]
Niu, Jia-Sheng [1 ,2 ]
Zhu, Hong-Liang [3 ]
Zhu, Hong-Qing [1 ,2 ]
Zhuang, Wan-Ru [3 ]
机构
[1] Key Lab. Univ. Radiat. Beam T., Inst. of Low Energy Nuclear Physics, Beijing Normal University, Beijing 100875, China
[2] Beijing Radiation Center, Beijing 100875, China
[3] Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
来源
| 2001年 / Allerton Press Inc.卷 / 18期
关键词
Band-gap tuning - Impurity free vacancy diffusion - InGaAsP/InP - Intrinsic defects - Laser structures - Multiple quantum well laser - Plasma bombardment - Sample surface - Surface decomposition;
D O I
10.1088/0256-307X/18/1/335
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