SiC THIN-FILM THERMISTOR.

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作者：

Wasa, Kiyotaka

Tohda, Takao

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来源：

| 1600年 / 24期

关键词：

SEMICONDUCTOR DEVICES;

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摘要：

This paper describes a SiC thin-film thermistor for high temperature developed by using RF-sputtered SiC semiconductor thin films. This thermistor can be used for industrial and consumer use within an operating temperature range of minus 100 degree to 450 degree C. By using SiC thin films, the thermistor maintains high electric stability. The resistance change, for example, is less than 3% after exposure to heat at 400 degree C for 2000 hours. A newly developed film growth technique has made possible the production of the high accuracy thermistor. This thermistor has various applications: temperature sensing, temperature control, flame detection, etc.

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