SCANNING ELECTRON MICROSCOPE STUDY OF DISLOCATION EBIC AND CATHODOLUMINESCENCE CONTRAST.

被引：0

作者：

Holt, D.B.

Lesniak, M.

机构：

来源：

Bulletin of the Academy of Sciences of the U.S.S.R. Physical series | 1986年 / 51卷 / 09期

关键词：

CATHODOLUMINESCENCE - MICROSCOPIC EXAMINATION - Scanning Electron Microscopy;

D O I：

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学科分类号：

摘要：

This paper deals with topics related to extracting the maximum information from signals obtained by charge accumulation (CA), i. e. , identifying defects in practical cases and researching fundamental dislocation topics by CA or EBIC spectroscopy. The topics discussed are the following: dislocation depth and EBIC contrast, defect identification and charge accumulation EBIC spectroscopy, temperature dependence of dislocation EBIC contrast and defects in multilayer epitaxial structures.

引用

页码：67 / 71