Optical properties of sputtered Ge films

被引：0

作者：

Yamaguchi, T. ^{[1
]}

Ohmi, T. ^{[1
]}

Aoyama, M. ^{[1
]}

机构：

[1] Shizuoka Univ., Johoku, Hamamtsu,, Jpn

来源：

Proceedings of SPIE - The International Society for Optical Engineering | 1994年 / 2364卷

关键词：

Dielectric constants - Quartz substrate - Sputtered films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：351 / 356

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