Depth profiling of phosphorus using resonances in the 31P(α, p)34S reaction

被引：0
|
作者：
McIntyre Jr., L.C. [1 ]
Leavitt, J.A. [1 ]
Dezfouly-Arjomandy, B. [1 ]
Oder, J. [1 ]
机构：
[1] Univ of Arizona, United States
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1988年 / B35卷 / 3-4期
关键词：
The authors would like to thank P. Stoss for his fine job of maintaining and operating the accelerator used in this experiment. We also thank D. Ashbaugh; Z. Yang and Z. Lin for assistance in taking data. The uniform 31P-in-Si0; sample was provided through the courtesy of P.L. Burnett of Polaroid Research Laboratories in Cambridge; Massachusetts.T hanks also to Rich Gregory of Motorola; Phoenix; Arizona for providing the implanted samples. This work was partially supported by the Optical Data Storage Center and the Center for Thin Film Studies (AFOSR-URI); both administered through the Optical Sciences Center; University of Arizona;
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摘要：
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页码：446 / 450
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