Measurement of the state of stress in silicon with micro-Raman spectroscopy

被引：0
|
作者：
机构：
[1] Harris, Stephen J.
[2] O'Neill, Ann E.
[3] Yang, Wen
[4] Gustafson, Peter
[5] Boileau, James
[6] Weber, W.H.
[7] Majumdar, Bhaskar
[8] Ghosh, Somnath
来源：
Harris, S.J. (sharri42@ford.com) | 1600年 / American Institute of Physics Inc.卷 / 96期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
18
引用
收藏
相关论文
共 50 条
  • [41] Residual stress measurements in polycrystalline graphite with micro-Raman spectroscopy
    Krishna, Ram
    Jones, Abbie N.
    Edge, Ruth
    Marsden, Barry J.
    RADIATION PHYSICS AND CHEMISTRY, 2015, 111 : 14 - 23
  • [42] Enabling the measurement of thermomechanical stress in solar cells and PV modules by confocal micro-Raman spectroscopy
    Beinert, Andreas J.
    Buechler, Andreas
    Romer, Pascal
    Haueisen, Viola
    Rendler, Li Carlos
    Schubert, Martin C.
    Heinrich, Martin
    Aktaa, Jarir
    Eitner, Ulrich
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2019, 193 : 351 - 360
  • [43] Experimental validation of mechanical stress models by micro-Raman spectroscopy
    IMEC, Leuven, Belgium
    Microelectron Reliab, 11-12 ([d]1751-1754):
  • [44] On the noise limit of stress and temperature measurements with micro-Raman spectroscopy
    van Spengen, W. Merlijn
    Roca, Joan Belles
    JOURNAL OF RAMAN SPECTROSCOPY, 2013, 44 (07) : 1039 - 1044
  • [45] Experimental challenges of stress measurements with resonant micro-Raman spectroscopy
    Dietrich, B
    Dombrowski, KF
    JOURNAL OF RAMAN SPECTROSCOPY, 1999, 30 (10) : 893 - 897
  • [46] Experimental validation of mechanical stress models by micro-Raman spectroscopy
    DeWolf, I
    Pozzat, G
    Pinardi, K
    Howard, DJ
    Ignat, M
    Jain, SC
    Maes, HE
    MICROELECTRONICS AND RELIABILITY, 1996, 36 (11-12): : 1751 - 1754
  • [47] DRUG ANALYSIS BY RAMAN AND MICRO-RAMAN SPECTROSCOPY
    HUONG, PV
    JOURNAL OF PHARMACEUTICAL AND BIOMEDICAL ANALYSIS, 1986, 4 (06) : 811 - 823
  • [48] A metrology of silicon film thermal conductivity using micro-Raman spectroscopy
    Liu, Xi
    Wu, Xiaoming
    Ren, Tianling
    2010 IEEE INTERNATIONAL SOI CONFERENCE, 2010,
  • [49] Determination of stress components in a complex stress condition using micro-Raman spectroscopy
    Ma, Lulu
    Zheng, Jiaxing
    Fan, Xuejun
    Qiu, Wei
    OPTICS EXPRESS, 2021, 29 (19) : 30319 - 30326
  • [50] Quantitative Micro-Raman Spectroscopy for Partial Pressure Measurement in Small Volumes
    Karlen, Sylvain
    Gobet, Jean
    Overstolz, Thomas
    Haesler, Jacques
    Lecomte, Steve
    APPLIED SPECTROSCOPY, 2017, 71 (12) : 2707 - 2713
12345