Diffractive microlenses replicated in fused silica for excimer laser beam homogenizing

被引：0
作者：
Nikolajeff, Fredrik [1 ]
Hard, Sverker [1 ]
Curtis, Bernard [1 ]
机构：
[1] Chalmers Univ of Technology, Goteborg, Sweden
来源：
Doktorsavhandlingar vid Chalmers Tekniska Hogskola | 1997年 / 1263期
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