Diffractive microlenses replicated in fused silica for excimer laser beam homogenizing

被引：0
作者：
Nikolajeff, Fredrik [1 ]
Hard, Sverker [1 ]
Curtis, Bernard [1 ]
机构：
[1] Chalmers Univ of Technology, Goteborg, Sweden
来源：
Doktorsavhandlingar vid Chalmers Tekniska Hogskola | 1997年 / 1263期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1 / 24
相关论文
共 50 条
  • [31] Compaction and rarefaction of fused silica with 193-nm excimer laser exposure
    Algots, JM
    Sandstrom, R
    Partlo, W
    Maroevic, P
    Eva, E
    Gerhard, M
    Lindner, R
    Stietz, F
    OPTICAL MICROLITHOGRAPHY XVI, PTS 1-3, 2003, 5040 : 1639 - 1650
  • [32] Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision
    Zimmer, K
    Böhme, R
    Rauschenbach, B
    MICROELECTRONIC ENGINEERING, 2005, 78-79 : 324 - 330
  • [33] Laser Beam Homogenizing: Limitations and Constraints
    Voelkel, Reinhard
    Weible, Kenneth J.
    OPTICAL FABRICATION, TESTING, AND METROLOGY III, 2008, 7102
  • [34] Characteristic of diffractive optical element for multi-spot beam homogenizing
    Hirai, T
    Fuse, K
    Kurisu, K
    Ebata, K
    LASER BEAM SHAPING V, 2004, 5525 : 148 - 155
  • [35] Fused Silica Microlenses for Hermetic Packages as part of Implantable Optrodes
    Rudmann, L.
    Huber, S. D.
    Ordonez, J. S.
    Stieglitz, T.
    2015 37TH ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY (EMBC), 2015, : 7143 - 7146
  • [36] Laser Processing of Silicon Suboxide for the Fabrication of Multilevel Fused Silica Diffractive Phase Elements
    Richter, Lukas Janos
    Beckmann, Clemens M.
    Meinertz, Jorg
    Ihlemann, Juergen
    JOURNAL OF LASER MICRO NANOENGINEERING, 2018, 13 (03): : 249 - 253
  • [37] Fabrication of diffractive phase elements by F2-laser ablation of fused silica
    Schulz-Ruhtenberg, M
    Ihlemann, H
    Marowsky, G
    Nejadmalayeri, AH
    Ng, ML
    Li, H
    Herman, PR
    FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 113 - 117
  • [38] Excimer laser fabrication of diffractive optical elements
    Winfield, RJ
    Meister, M
    Crean, GM
    Paineau, S
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2000, 3 (5-6) : 481 - 486
  • [39] Morphological and ablation characteristics of brass and fused silica after interaction with ArF excimer laser
    Shaheen, M. E.
    Gagnon, J. E.
    Fryer, B. J.
    OPTIK, 2022, 262
  • [40] DEPENDENCE OF THE DAMAGE AND TRANSMISSION PROPERTIES OF FUSED-SILICA FIBERS ON THE EXCIMER LASER WAVELENGTH
    TAYLOR, RS
    LEOPOLD, KE
    BRIMACOMBE, RK
    MIHAILOV, S
    APPLIED OPTICS, 1988, 27 (15): : 3124 - 3134
12345