Reducing silicon-substrate parasitics of on-chip transformers

被引：0

作者：

Berkeley Sensor and Actuator Center, University of California Berkeley, Berkeley, CA 94720, United States ^{[1
]}

机构：

来源：

Proc IEEE Micro Electro Mech Syst MEMS | / 649-652期

关键词：

Compendex;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Chemical mechanical polishing - Deposition - Microelectromechanical devices - Micromachining - Natural frequencies - Oxidation - Q factor measurement - Reactive ion etching - Silica - Substrates

引用