Solid-source doping of a-Si:H thin films deposited with a remote hydrogen plasma

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[1] Johnson, N.M.
[2] Street, R.A.
[3] Walker, J.
[4] Winer, K.
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Johnson, N.M. | 1600年 / 114期
关键词：
Gaseous Hydrides - Hydrogenated Amorphous Silicon Thin Films - Remote Hydrogen Plasma;
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