Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance

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Lab. de Génie Electrique, ESA 5003, Université Paul Sabatier, 118, route de Narbonne, 31062 Toulouse Cedex, France [1 ]
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Appl Surf Sci | / 1-4卷 / 285-291期
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