NEW INTERFEROMETRIC ALIGNMENT TECHNIQUE WITH HOLOGRAPHIC CONFIGURATION.

被引：0

作者：

Nomura, Noboru ^{[1
]}

Matsumura, Takayoshi ^{[1
]}

Yonezawa, Taketoshi ^{[1
]}

Kugimiya, Koichi ^{[1
]}

机构：

[1] Matsushita Electric Industrial Co,, Central Research Lab, Moriguchi, Jpn, Matsushita Electric Industrial Co, Central Research Lab, Moriguchi, Jpn

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1985年 / 24卷 / 11期

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D O I：

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摘要：

引用

页码：1555 / 1560

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