Preparation of SrBi2Ta2O9 thin films by liquid-delivery metalorganic chemical vapor deposition using a double alcoholate source

被引：0

作者：

Jimbo, Takehito ^{[1
,3
]}

Sano, Haruyuki ^{[1
]}

Takahashi, Yuji ^{[1
]}

Funakubo, Hiroshi ^{[2
]}

Tokumitsu, Eisuke ^{[2
]}

Ishiwara, Hiroshi ^{[1
]}

机构：

[1] Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagalsutn, Midori-ku, Yokohama 226- 8503, Japan

[2] Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagalsuta, Midori-ku, Yokohama 226-8503, Japan

[3] Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagalsuia, Midori-ku, Yokohama 226-S503, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 11期

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页码：6456 / 6461