Preparation of SrBi2Ta2O9 thin films by liquid-delivery metalorganic chemical vapor deposition using a double alcoholate source

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作者
Jimbo, Takehito [1 ,3 ]
Sano, Haruyuki [1 ]
Takahashi, Yuji [1 ]
Funakubo, Hiroshi [2 ]
Tokumitsu, Eisuke [2 ]
Ishiwara, Hiroshi [1 ]
机构
[1] Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagalsutn, Midori-ku, Yokohama 226- 8503, Japan
[2] Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagalsuta, Midori-ku, Yokohama 226-8503, Japan
[3] Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagalsuia, Midori-ku, Yokohama 226-S503, Japan
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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 11期
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页码:6456 / 6461
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