共 50 条
- [37] Quantitative two-dimensional dopant profiling of abrupt dopant profiles by cross-sectional scanning capacitance microscopy JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1168 - 1171
- [38] Advances in experimental technique for quantitative two-dimensional dopant profiling by scanning capacitance microscopy Review of Scientific Instruments, 1999, 70 (1 pt 1):
- [40] Two-dimensional dopant profiling of a 60nm gate length nMOSFET using scanning capacitance microscopy INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST, 1998, : 555 - 558