Scanning electron microscope with high excitation objective lens

Optical properties and construction of a magnetic immersion objective lens for use in the electron- optical systems of scanning electron microscopes and other microprobe devices are discussed. Such a lens having smaller aberrations than a conventional lens gives high current density in the probe consequently improving the resolution. A method is recommended for the practical design of a microprobe system with such an objective. See also English translation in Sov J Opt Technol v 38 n 4 Apr 1971 p 215-18