MCM-L compatible integrated resistors and capacitors

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Georgia Inst of Technology, Atlanta, United States [1 ]
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Proceedings of the International Symposium and Exhibition on Advanced Packaging Materials Processes, Properties and Interfaces | 1998年
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The authors wish to thank Ohmega Technologies; TAM ceramics; Ciba-Geigy; and Shipley Corporation for materials donation. The work was supported by National Science Foundation through the Georgia Tech/NSF Engineering Research Center in Electronic Packaging (NSF Contract No.: EEC-9402723). S. Bhattacharya wishes to thank Alan Krauss for his help in meniscus coating and Bruce Mahler of Ohmega Technologies for his recommendations in resistor fabrication;
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页码:295 / 299
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