Selection of method for estimating the inhomogeneity of large-diameter industrial silicon crystals

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作者：
Yurova, E.S.
Shvedova, O.I.
Kanevskaya, V.M.
Tarasov, V.K.
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Industrial Laboratory (USSR) (English translation of Zavodskaya Laboratoriya) | 1991年 / 56卷 / 10期
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