Selection of method for estimating the inhomogeneity of large-diameter industrial silicon crystals

被引:0
|
作者
Yurova, E.S.
Shvedova, O.I.
Kanevskaya, V.M.
Tarasov, V.K.
机构
来源
Industrial Laboratory (USSR) (English translation of Zavodskaya Laboratoriya) | 1991年 / 56卷 / 10期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] SELECTION OF METHOD FOR ESTIMATING THE INHOMOGENEITY OF LARGE-DIAMETER INDUSTRIAL SILICON-CRYSTALS
    YUROVA, ES
    SHVEDOVA, OI
    KANEVSKAYA, VM
    TARASOV, VK
    INDUSTRIAL LABORATORY, 1990, 56 (10): : 1192 - 1194
  • [2] COOLING RATES OF LARGE-DIAMETER SILICON-CRYSTALS
    CAPPER, P
    WILKES, JG
    APPLIED PHYSICS LETTERS, 1978, 32 (03) : 187 - 189
  • [3] ESTIMATING AQUIFER PARAMETERS FOR LARGE-DIAMETER WELLS
    RUSHTON, KR
    HOLT, SM
    GROUND WATER, 1981, 19 (05) : 505 - 509
  • [4] TRANSIENT REGIMES IN THE GROWTH OF LARGE-DIAMETER CRYSTALS
    NALBANDYAN, GH
    NEMENOV, VA
    CRYSTAL RESEARCH AND TECHNOLOGY, 1988, 23 (04) : 577 - 581
  • [5] Nickel precipitation in large-diameter Czochralski silicon
    Xi, ZQ
    Yang, DR
    Chen, J
    Que, DL
    Moeller, HJ
    PHYSICA B-CONDENSED MATTER, 2004, 344 (1-4) : 407 - 412
  • [6] LARGE-DIAMETER SILICON-WAFER TRENDS
    BULLIS, WM
    OMARA, WC
    SOLID STATE TECHNOLOGY, 1993, 36 (04) : 59 - &
  • [7] Copper precipitation in large-diameter Czochralski silicon
    Xi, ZQ
    Chen, J
    Yang, DR
    Lawerenz, A
    Moeller, HJ
    JOURNAL OF APPLIED PHYSICS, 2005, 97 (09)
  • [8] Copper precipitation in large-diameter Czochralski silicon
    Xi, Zhenqiang
    Chen, Jun
    Yang, Deren
    Lawerenz, A.
    Moeller, H.J.
    Journal of Applied Physics, 2005, 97 (09):
  • [9] Quality control theory and technologies for large-diameter Czochralski silicon crystals: Challenges and strategies
    Ma, Xiangyang
    Yuan, Shuai
    Zhao, Tong
    Yang, Deren
    CHINESE SCIENCE BULLETIN-CHINESE, 2025, 70 (4-5): : 544 - 548
  • [10] Growth of large-diameter ZnTe single crystals by the vertical gradient freezing method
    Asahi, T
    Arakawa, A
    Sato, K
    JOURNAL OF CRYSTAL GROWTH, 2001, 229 (01) : 74 - 78