Mechanical, optical and structural properties of TiO2 and MgF2 thin films deposited by plasma ion assisted deposition

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作者：
Atanassov, George [1 ]
Turlo, James [2 ]
Fu, Ji Kai [3 ]
Dai, Yi Sheng [3 ]
机构：
[1] DiCon Fiberoptics, Inc., 1331 Eight Street, Berkeley, CA 94710, United States
[2] KLA-Tencor Instruments, Surface Metrology Division, Milpitas, CA 95035, United States
[3] Singapore Productivity and Std. Bd., Thin Film Sect., 1 Sci. Pk. D., Singapore, Singapore
来源：
Thin Solid Films | 1999年 / 342卷 / 01期
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页码：83 / 92
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