Mechanical, optical and structural properties of TiO2 and MgF2 thin films deposited by plasma ion assisted deposition

被引：0

作者：

Atanassov, George ^{[1
]}

Turlo, James ^{[2
]}

Fu, Ji Kai ^{[3
]}

Dai, Yi Sheng ^{[3
]}

机构：

[1] DiCon Fiberoptics, Inc., 1331 Eight Street, Berkeley, CA 94710, United States

[2] KLA-Tencor Instruments, Surface Metrology Division, Milpitas, CA 95035, United States

[3] Singapore Productivity and Std. Bd., Thin Film Sect., 1 Sci. Pk. D., Singapore, Singapore

来源：

Thin Solid Films | 1999年 / 342卷 / 01期

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D O I：

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摘要：

引用

页码：83 / 92

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