共 44 条
- [43] Plasma etching of Hf-based high-k thin films. Part II. Ion-enhanced surface reaction mechanisms JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (02): : 217 - 223
- [44] Molecular structure of interfaces formed with plasma-polymerized silica-like primer films: Part II. Characterization of the primer/metal interface using X-ray photoelectron spectroscopy in situ JOURNAL OF ADHESION, 2002, 78 (06): : 465 - 493