Low temperature growth of 3C-SiC on silicon for advanced substrate development

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作者：

Okhuysen, M.E. ^{[1
]}

Mazzola, M.S. ^{[1
]}

Lo, Y.-H. ^{[2
]}

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[1] Emerging Mat. Research Laboratory, Dept. of Elec. and Comp. Engineering, Mississippi State, MS 39762-9571, United States

[2] School of Electrical Engineering, Cornell University, Ithaca, NY 14853-5401, United States

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