Laser linear and angular displacement interferometer

被引：0
|
作者：
Kiryanov, V. P.
Lenkova, G. A.
Lokhmatov, A. I.
Tarasov, G. G.
机构：
来源：
Optoelectronics, Instrumentation and Data Processing (English translation of Avtometriya) | 1994年 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] LINEAR ANGULAR DISPLACEMENT INTERFEROMETER FOR WAFER STAGE METROLOGY
    SOMMARGREN, GE
    OPTICAL/LASER MICROLITHOGRAPHY II, 1989, 1088 : 268 - 272
  • [2] Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement
    Zhang, C
    Wang, XZ
    OPTICAL ENGINEERING, 2004, 43 (12) : 3008 - 3013
  • [3] A dual-heterodyne laser interferometer for simultaneous measurement of linear and angular displacements
    Yan, Hao
    Duan, Hui-Zong
    Li, Lin-Tao
    Liang, Yu-Rong
    Luo, Jun
    Yeh, Hsien-Chi
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (12):
  • [4] Scanning Twyman interferometer for measuring small angular displacement
    Ma Jianguo
    Tong Yue
    FOURTH INTERNATIONAL SEMINAR ON MODERN CUTTING AND MEASUREMENT ENGINEERING, 2011, 7997
  • [5] An angular displacement interferometer based on total internal reflection
    Zhou, WD
    Cai, LL
    MEASUREMENT SCIENCE AND TECHNOLOGY, 1998, 9 (10) : 1647 - 1652
  • [6] New parallel plate interferometer for measuring angular displacement
    Zheng, Defeng
    Wang, Xiangzhao
    Sasaki, Osami
    3RD INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, PARTS 1-3, 2007, 6723
  • [7] A linear/angular interferometer capable of measuring large angular motion
    Zhang, JH
    Menq, CH
    MEASUREMENT SCIENCE AND TECHNOLOGY, 1999, 10 (12) : 1247 - 1253
  • [8] PHOTOELECTRIC LINEAR AND ANGULAR DISPLACEMENT CONVERTERS
    GOLUBOVSKII, YM
    PIVOVAROVA, LN
    AFANASEVA, ZK
    SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1984, 51 (08): : 485 - 493
  • [9] AN INTERFEROMETRIC ANGULAR AND LINEAR DISPLACEMENT SENSOR
    ILIN, VN
    MEASUREMENT TECHNIQUES USSR, 1988, 31 (02): : 115 - 117
  • [10] Optimum design of parallel plate interferometer for angular displacement measurement
    Zheng, De-Feng
    Wang, Xiang-Zhao
    Zhongguo Jiguang/Chinese Journal of Lasers, 2007, 34 (03): : 422 - 426
12345