Design and fabrication of a micro-electro-mechanical system (MEMS) pressure sensor for rehabilitation engineering applications

被引：0
作者：
Dept. of Electronics Eng., Fortune Jr. Coll. of Tech. and Comm., Chi-shan Town, Kaohsiung, Taiwan [1 ]
不详 [2 ]
不详 [3 ]
不详 [4 ]
不详 [5 ]
机构：
来源：
ASME Bioeng Div Publ BED | / 455-456期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
3
引用
收藏
相关论文
共 50 条
[31]   Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review [J].
Faudzi, Ahmad Athif Mohd ;
Sabzehmeidani, Yaser ;
Suzumori, Koichi .
JOURNAL OF ROBOTICS AND MECHATRONICS, 2020, 32 (02) :281-288
[32]   Design of a Microelectronic Circuit to Amplify and Modulate the Signal of a Micro-Electro-Mechanical Systems Arterial Pressure Sensor [J].
Vela-Pena, E. ;
Quinones-Uriostegui, I. ;
Martinez-Pinon, F. ;
Alvarez-Chavez, J. A. .
NANOSENSORS, BIOSENSORS, AND INFO-TECH SENSORS AND SYSTEMS 2010, 2010, 7646
[33]   Assembly and characterization of optical MEMS (Micro-Electro-Mechanical Systems) [J].
Khalil, D ;
Morshed, AH .
THIRD WORKSHOP ON PHOTONICS AND ITS APPLICATION AT EGYPTIAN ENGINEERING FACULTIES & INSTITUTES, 2002, :111-116
[34]   Bonding and strain behavior of graphene/boron nitride diaphragm of micro-electro-mechanical system pressure sensor [J].
Qin Y. ;
Zeng Y. ;
Wang D. ;
Yang Y. ;
Lu X. .
Fuhe Cailiao Xuebao/Acta Materiae Compositae Sinica, 2022, 39 (07) :3337-3345
[35]   Characteristics of semiconductor bridge (SCB) plasma generated in a micro-electro-mechanical system (MEMS) [J].
Kim, JU ;
Park, CO ;
Park, MI ;
Kim, SH ;
Lee, JB .
PHYSICS LETTERS A, 2002, 305 (06) :413-418
[36]   Micro-Electro-Mechanical System (MEMS)-Based Piezoelectric Energy Harvester for Ambient Vibrations [J].
Saadon, Salem ;
Sidek, Othman .
WORLD CONFERENCE ON TECHNOLOGY, INNOVATION AND ENTREPRENEURSHIP, 2015, :2353-2362
[37]   Piezoresistive micro-electro-mechanical applications in diamond films [J].
Holmes, KC ;
Davidson, JL ;
Kang, WP .
MICROFABRICATED SYSTEMS AND MEMS VI, PROCEEDINGS, 2002, 2002 (06) :77-83
[38]   Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor [J].
Liang, Jinxing ;
Kohsaka, Fusao ;
Matsuo, Takahiro ;
Li, Xuefeng ;
Kunitomo, Ken ;
Ueda, Toshitsugu .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (06) :06FK101-06FK104
[39]   Design and fabrication of an electrostatic variable gap comb drive in micro-electro-mechanical systems [J].
Ye, WJ ;
Mukherjee, S .
CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES, 2000, 1 (01) :111-120
[40]   Design methods for micro-electro-mechanical bandpass filters [J].
Galayko, D ;
Kaiser, A .
DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001, 2001, 4408 :194-200
12345