BOMBARDMENT-INDUCED LIGHT EMISSION FOR THE ANALYSIS OF SURFACES.

被引：0
|
作者：
Thomas, Gary E.
de Kluizenaar, Erik E.
机构：
来源：
Acta Electronica | 1975年 / 18卷 / 01期
关键词：
ELECTRIC INSULATING MATERIALS - Spectroscopic Analysis - GLASS - Spectroscopic Analysis - SPECTROSCOPY;
D O I：
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中图分类号：
学科分类号：
摘要：
The spectral distribution of light emitted by particles sputtered from a surface in an excited state by an energetic ion or neutral beam can be used for surface analysis. The light emission technique is reasonably simple, is readily applied to the analysis of insulating materials and can give information on surface chemistry. It is illustrated with examples of the analyses of glasses, iron-containing materials and chemisorbed layers.
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页码：63 / 68
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