ENERGY DISTRIBUTIONS OF NEUTRAL ATOMS SPUTTERED FROM Cu, V AND Nb UNDER DIFFERENT BOMBARDMENT AND EJECTION ANGLES.

被引：0

作者：

Dembowski, J. ^{[1
]}

Oechsner, H. ^{[1
]}

Yamamura, Y. ^{[1
]}

Urbassek, M. ^{[1
]}

机构：

[1] Univ Kaiserslautern, Kaiserslautern, West Ger, Univ Kaiserslautern, Kaiserslautern, West Ger

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B18卷 / 4-6期

关键词：

IONS - RADIATION EFFECTS;

D O I：

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摘要：

The energy distributions of neutral atoms sputtered from clean polycrystalline metals (Cu, V, Nb) have been measured for different combinations of the angle of incidence theta //i of the bombarding Ar** plus ions and the ejection angle theta //e ( theta //i/ theta //e equals 0 degree /0 degree , 20 degree /70 degree , 70 degree /20 degree and 45 degree /45 degree ), and for bombarding energies of 0. 6, 1. 0 and 2. 0 kev. For oblique bombarding and ejection angles the measured energy distributions show significant deviations from the well known E/(E plus U//0)**3 formula. This is discussed with regard to the incomplete development of the sputtering cascades.

引用

页码：464 / 470