Substructures of stainless steels after low-cycle fatigue at high temperatures were examined under a transmission electron microscope. Below 600 degree C the substructures were of the well-developed cell-type, while above 700 degree C they had the subgrain-type substructure due to the recovery process during the fatigue tests. The cyclic hardening behavior depended on the strain rate as well as the testing temperature and the strain range, but the saturated stress ranges were correlated with the cell or subgrain size.