Ion cluster beam deposition of thin films

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作者：
Brown, W.L.
Jarrold, M.F.
McEachern, R.L.
Sosnowski, M.
Takaoka, G.
Usui, H.
Yamada, I.
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Nuclear Instruments & Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1991年 / 59-60卷 / pt 1期
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