Study of deposition parameters, properties for PVD TixN and CrxN coatings using a closed field unbalanced magnetron sputter ion plating system

被引：0

作者：

Sun, Hailin ^{[1
]}

Field, Susan ^{[1
]}

Chen, Jian ^{[2
]}

Teer, Dennis G. ^{[1
]}

机构：

[1] Teer Coatings Ltd., Droitwich, WR9 9AS, United Kingdom

[2] Lab. of Mech. Behaviour for Mat., Xi'an Jiaotong Univ., China

来源：

Cailiao Rechuli Xuebao/Transactions of Materials and Heat Treatment | 2004年 / 25卷 / 05期

关键词：

Adhesion - Chromium compounds - Ions - Magnetron sputtering - Microhardness - Plating - Substrates - Titanium nitride - Wear resistance;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Closed field unbalanced magnetron sputter ion plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different hard coatings, have been chosen to study the coating process parameters for the CFUBMSIP system. The process parameters, such as substrate temperature, substrate bias and optical emission microscope (OEM) control, have been carefully examined to achieve hard and wear-resistance coatings with good adhesion. The coating structure and orientation were found to change according to the coating parameters. The Rockwell test and scratch test were carried out to examine the coating adhesion; pin-on-disc testing was used to estimate the wear resistance; microhardness was also used to determine coating hardness. High speed steel (HSS) drill testing has been carried out to study the general properties of the coating for cutting tool application. A combination of process parameters can be selected to achieve good performance for the TiN and CrN coatings.

引用

页码：841 / 846