Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films

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Microelectronics Laboratory, Department of Electrical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260, Singapore [1 ]
不详 [2 ]
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Thin Solid Films | / 108-110期
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Number:; 6471; Acronym:; -; Sponsor:; NUS; Sponsor: National University of Singapore;
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