METHOD OF FABRICATING DEFLECTION COILS FOR ELECTRON LITHOGRAPHY SYSTEMS.

被引：0

作者：

Anon

机构：

来源：

IBM technical disclosure bulletin | 1986年 / 29卷 / 02期

关键词：

ELECTRON BEAMS - LITHOGRAPHY;

D O I：

暂无

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学科分类号：

摘要：

The use of multilayer ceramic (MLC) techniques is proposed for fabricating deflection coils for electron beam lithography machines. Preformed unfired ceramic sheets with metallization patterns, applied as a conductive paste by a silk screen process, are stacked together and fired to form an accurately defined monolithic deflection coil assembly, which is compact and mechanically stable. Conductor positions cannot move relative to each other due to thermal expansion or otherwise. Cooling channels also could be provided through the assembly.

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