A first-order linearized model of the constant capacitance DLTS system is presented and properties of the system are studied in terms of this model. It is shown that the possibility of speed improvement depends on the positions of the higher poles of the RF bridge relative to its dominant pole and on the overload recovery performance of the RF circuit. The addition of an integrator in the feedback circuit can significantly improve the DC tracking to the system. Finally the applicability of the constant capacitance DLTS system is discussed.