The effect of composition on the self-diffusivity of Si and Ge in Si1-xGex by using first principles is presented in the article. The Ge activation-minus-formation (AMF) energy was combined with the vacancy formation energy to find the variation of the activation energy for Ge diffusion in Si1-xGex as a function of composition. The variation of the correlation factor for Ge diffusion in Si1-xGex as a function of composition and temperature is also presented.