E-beam deposited SnO2, Pt-SnO2 and Pd-SnO2 thin films for LPG detection

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Department of Electrical Engineering, Indian Institute of Technology, Bombay IIT, Powai, Mumbai 400 076, India [1 ]
不详 [2 ]
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Thin Solid Films | / 1卷 / 260-265期
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Chemical sensors - Deposition - Liquefied petroleum gas - Palladium compounds - Platinum compounds - Semiconducting tin compounds;
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摘要：
The electron-beam evaporation method was used to deposit undoped and Pt (or Pd) doped SnO2 thin films. After careful study of their physical properties, SnO2 thin films with suitable growth conditions were selected for probing their response to LPG and other common household gases. The response behaviour is explained with the help of theoretical models. Based on these results, the optimum parameters for film growth and sensor operation were identified for LP gas detection.
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