Effect of carbon content in substrate on CVD TiN coating

被引:0
作者
Chen, Erbao [1 ]
机构
[1] East China Inst of Metallurgy, Maanshan, China
来源
Jinshu Xuebao/Acta Metallurgica Sinica | 1991年 / 27卷 / 06期
关键词
Chemical vapor deposition - Coatings;
D O I
暂无
中图分类号
TQ153 [电镀工业];
学科分类号
摘要
Seven different steels were used as substrates for CVD tin coating. The results indicate that the deposition rate increases linearly with the increase of carbon content in each substrate. Besides TiN peak, α-Fe peak is revealed in the X-ray diffraction pattern of TiN coating. The (220) preferred growth of TiN deposited on Cr12MoV steel substrate increases with the increase of depositing temperature. In the interior of the TiN layer and at the bright region of the coating surface, only Ti energy spectrum is found,while both Ti and Fe energy spectra are revealed at the dark region under SEM.
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