X-ray scattering from silicon surfaces

被引：0
|
作者：
Stoemmer, R. [1 ]
Goebel, H. [1 ]
Martin, A.R. [1 ]
Hub, W. [1 ]
Pietsch, U. [1 ]
机构：
[1] Siemens AG, Munich, Germany
来源：
Semiconductor International | 1998年 / 21卷 / 05期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：81 / 82
相关论文
共 50 条
  • [1] X-ray scattering from silicon surfaces:: a useful tool for quality control
    Stömmer, R
    Martin, AR
    Hub, W
    Göbel, H
    Pietsch, U
    MICROELECTRONIC ENGINEERING, 1999, 45 (2-3) : 257 - 263
  • [2] X-ray Scattering from Random Rough Surfaces
    Zhao, Ping
    EUV AND X-RAY OPTICS: SYNERGY BETWEEN LABORATORY AND SPACE VI, 2019, 11032
  • [3] X-ray scattering from magnetic, rough surfaces
    Osgood, RM
    Sinha, SK
    Freeland, JW
    Idzerda, YU
    Bader, SD
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (08) : 4619 - 4621
  • [4] X-ray scattering from surfaces of organic crystals
    Gidalevitz, D
    Feidenhansl, R
    Smilgies, DM
    Leiserowitz, L
    SURFACE REVIEW AND LETTERS, 1997, 4 (04) : 721 - 732
  • [5] X-RAY RESONANT MAGNETIC SCATTERING FROM SURFACES
    FASOLINO, A
    CARRA, P
    ALTARELLI, M
    PHYSICAL REVIEW B, 1993, 47 (07): : 3877 - 3881
  • [6] X-ray Scattering From Liquid Surfaces: Effect of Resolution
    Pershan, P. S.
    JOURNAL OF PHYSICAL CHEMISTRY B, 2009, 113 (12): : 3639 - 3646
  • [7] X-RAY AND NEUTRON-SCATTERING FROM ROUGH SURFACES
    SINHA, SK
    SIROTA, EB
    GAROFF, S
    STANLEY, HB
    PHYSICAL REVIEW B, 1988, 38 (04): : 2297 - 2311
  • [8] X-ray scattering from magnetically and structurally rough surfaces
    Osgood, RM
    Sinha, SK
    Freeland, JW
    Idzerda, YU
    Bader, SD
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1999, 198-99 : 698 - 702
  • [9] X-ray scattering at liquid surfaces and interfaces
    Daillant, J
    CURRENT SCIENCE, 2000, 78 (12): : 1496 - 1506
  • [10] X-ray scattering studies of surfaces and interfaces
    Sanyal, MK
    RADIATION PHYSICS AND CHEMISTRY, 1998, 51 (4-6): : 487 - 495
12345