Effect of substrate temperature on electrical characteristics of (Pb, La)(Zr, Ti)O3 ultrathin films deposited by metalorganic chemical vapor deposition

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Chubu Univ, Aichi, Japan [1 ]
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 9 B卷 / 5086-5090期
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