The present work demonstrates that the bulk oxygen-deficient YBCO samples can absorb oxygen from a plasma at a lower temperature (200°C) than that of heat treatment, and that the absorption of oxygen leads to the tetra-ortho transition of YBCO samples at this special temperature. Additionally, it is emphasised that this kind of plasma treatment is useful for oxygen absorption of thick YBCO films after preparation and can prevent the degradation of superconductivity resulting from the diffusion of substrate element atoms into the superconducting materials.