Optical and electrical diagnostics of fluorocarbon plasma etching processes

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Lab. de Spectrométrie Phys., Univ. Joseph Fourier - Grenoble I, CNRS UMR 5588, BP 87, 38402 St Martin d'Heres Cedex, France [1 ]
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Plasma Sources Sci Technol | / 2卷 / 249-257期
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