FABRICATION OF RF REACTIVELY SPUTTERED TiN THIN FILMS.

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作者
Kumar, N. [1 ]
Pourrezaei, K. [1 ]
Fissel, M. [1 ]
Begley, T. [1 ]
Lee, B. [1 ]
Douglas, E.C. [1 ]
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[1] Drexel Univ, Philadelphia, PA, USA, Drexel Univ, Philadelphia, PA, USA
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10
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页码:100 / 104
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